{"product_id":"pecvd-tube-furnace","title":"PECVD Tube Furnace","description":"\u003cp\u003e\u003cstrong\u003eProduct application:\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003ePECVD system consists of tube furnace, vacuum acquisition, flow control, and RF power supply. With 13.56 Mhz radio frequency output, the gas containing the atoms of the film is ionized to form plasma in the vacuum body. The strong chemical activity of the plasma is used to improve the reaction conditions and make the film composed of the gaseous substance undergoes a chemical reaction to realize a new preparation technology for the growth of thin film materials, and finally a few pieces of the desired thin film are deposited, which is suitable for the deposition of SiO2 and SiNx thin films at 1200ºC.\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eTube furnace can choose different tube diameter and length o f constant temperature zone, both ends of furnace tube are equipped with high vacuum stainless steel sealing flange\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003eVacuum system can choose different vacuum pumps according to test requirements, rotary vane vacuum pump vacuum≤5Pa, molecular pump vacuum unit 1x10⁻⁴Pa\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003eThe gas supply system can choose 3-channel float manual and 3-channel automatic mass flow system\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003eVacuum measurement i s digital compound vacuum machine or Pirani vacuum gauge\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003ePower output optional 200W, 300W, and 500W\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style=\"font-size: 0.875rem;\"\u003eThe thermostat has built-in RS485 digital communication port and USB adapter for optional configuration, which can be connected to PC for remote control and monitoring, the control and monitoring system can also save or export the test results\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eClick on \u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0967\/4296\/5581\/files\/SAFTHERM-Catalog-_16MB.pdf?v=1777992367\"\u003e\u003cspan\u003e\u003cb\u003e\u003ci\u003eProduct manual \u003c\/i\u003e\u003c\/b\u003e\u003c\/span\u003e\u003c\/a\u003eto download a PDF file\u003c\/p\u003e","brand":"Euro Lab Hub","offers":[{"title":"Default Title","offer_id":54369429389645,"sku":null,"price":0.0,"currency_code":"EUR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0967\/4296\/5581\/files\/ff.png?v=1784744436","url":"https:\/\/eurolabhub.eu\/products\/pecvd-tube-furnace","provider":"Euro Lab Hub","version":"1.0","type":"link"}