STGC-60-12 1200°C CVD Tube Furnace
- Includes Quartz glass tube with a set of stainless steel vacuum sealing
flanges with valves and silicon O rings, fittings for connection of
gas vacuum components. - Dual flanges support ensures better sealing and longer tube life
- One year warranty (consumable parts are not included), lifetime
technical support.
Chemical Vapor Deposition (CVD) tube furnaces feature a chamber with high quality alumina fiber insulation and high quality vacuum formed insulation resistance wire heating element, which ensures fast heat up, excellent temperature control and short cool down times; The CVD gas path system can be selected from one or three-way gas mass flow meters, and the gas mixing system can also be single-input and single-out. Accurate control of gas digital control, flow switch and flow time can b e automatically controlled by touch screen t o achieve unattended air control, accuracy: ±1% F.S, response time: ≤4sec; The vacuum system adopts a vacuum pump.
The vacuum measurement uses a digital composite vacuum machine or a Pirani vacuum gauge. The measuring instrument is integrated on the temperature control panel for easy operation. Furnace operation is controlled by Shimaden® (Japan) 32-segment digital controller with built-in RS485 digital communications port and USB adaptor, allowing the user to connect to a P C for remote control and monitoring o f the furnace. You can also save or export test results. All our furnaces are CE compliant.